32,910 XNAS Volume
XNAS 01 Apr, 2025 5:30 PM (EDT)
| Client Name | Client Category | Action | Reported to Exchange | Quantity | Post Transaction Holding | Traded % | Avg. Price | Value | Security Type |
|---|---|---|---|---|---|---|---|---|---|
| Wade M. Jenke | Chief Financial Officer | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 19 Mar 2025 | 25,000 | 25,000 | - | - | Restriced Stock Units | |
| Robert M. Averick | Director, Ten Percent Owner | Purchase of securities on an exchange or from another person at price $ 4.86 per share. | 10 Mar 2025 | 10,000 | 607,611 (4%) | 0% | 4.9 | 48,600 | Common Stock |
| Robert M. Averick | Director, Ten Percent Owner | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 06 Mar 2025 | 8,299 | 8,081 | - | - | Restricted Stock Units | |
| Robert M. Averick | Director, Ten Percent Owner | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 06 Mar 2025 | 8,299 | 597,611 (4%) | 0% | 0 | Common Stock | |
| Michael Garnreiter | Director | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 05 Mar 2025 | 8,299 | 30,488 (0%) | 0% | 0 | Amtech Systems, Inc. $0.01 par value common stock | |
| Michael Garnreiter | Director | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 05 Mar 2025 | 8,299 | 8,081 | - | - | Restricted Stock Units | |
| Michael Garnreiter | Director | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 05 Mar 2025 | 8,081 | 16,380 | - | - | Restricted Stock Units | |
| Michael M. Ludwig | Director | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 05 Mar 2025 | 8,299 | 24,988 (0%) | 0% | 0 | Amtech Systems, Inc. $0.01 par value common stock | |
| Michael M. Ludwig | Director | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 05 Mar 2025 | 8,081 | 16,380 | - | - | Restricted Stock Units | |
| Michael M. Ludwig | Director | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 05 Mar 2025 | 8,299 | 8,081 | - | - | Restricted Stock Units | |
| Asif Y. Jakwani | Director | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 05 Mar 2025 | 8,081 | 8,081 | - | - | Restricted Stock Units | |
| Robert M. Averick | Director, Ten Percent Owner | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 03 Mar 2025 | 8,081 | 16,380 | - | - | Restricted Stock Units | |
| Robert M. Averick | Director, Ten Percent Owner | Purchase of securities on an exchange or from another person at price $ 4.85 per share. | 03 Mar 2025 | 1,523 | 589,312 (4%) | 0% | 4.9 | 7,387 | Common Stock |
| Robert M. Averick | Director, Ten Percent Owner | Purchase of securities on an exchange or from another person at price $ 4.89 per share. | 03 Mar 2025 | 5,000 | 587,789 (4%) | 0% | 4.9 | 24,450 | Common Stock |
| Robert M. Averick | Director, Ten Percent Owner | Purchase of securities on an exchange or from another person at price $ 4.85 per share. | 13 Feb 2025 | 22,000 | 582,789 (4%) | 0% | 4.9 | 106,700 | Common Stock |
| Robert M. Averick | Director, Ten Percent Owner | Purchase of securities on an exchange or from another person at price $ 5.02 per share. | 07 Feb 2025 | 54,789 | 560,789 (3%) | 0% | 5.0 | 275,041 | Common Stock |
| M. Averick Robert | Director, Ten Percent Owner | Purchase of securities on an exchange or from another person at price $ 5.65 per share. | 11 Dec 2024 | 5,000 | 479,000 (3%) | 0% | 5.7 | 28,250 | Common Stock |
| Robert M. Averick | Director, Ten Percent Owner | Purchase of securities on an exchange or from another person at price $ 5.70 per share. | 11 Dec 2024 | 19,500 | 498,500 (3%) | 0% | 5.7 | 111,150 | Common Stock |
| M. Robert Averick | Director, Ten Percent Owner | Purchase of securities on an exchange or from another person at price $ 5.63 per share. | 11 Dec 2024 | 7,500 | 506,000 (3%) | 0% | 5.6 | 42,225 | Common Stock |
| Robert C. Daigle | Director, Chairman & CEO | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 14 Aug 2024 | 55,556 | 164,509 (1%) | 0% | 0 | Amtech Systems, Inc. $0.01 par value common stock | |
| Robert C. Daigle | Director, Chairman & CEO | Payment of exercise price or tax liability using portion of securities received from the company at price $ 6.36 per share. | 14 Aug 2024 | 15,472 | 149,037 (1%) | 0% | 6.4 | 98,402 | Amtech Systems, Inc. $0.01 par value common stock |
| Robert M. Averick | Director, Ten Percent Owner | Purchase of securities on an exchange or from another person at price $ 5.51 per share. | 09 Aug 2024 | 10,000 | 474,000 (3%) | 0% | 5.5 | 55,100 | Common Stock |
| Robert M. Averick | Director, Ten Percent Owner | Purchase of securities on an exchange or from another person at price $ 5.54 per share. | 09 Aug 2024 | 5,000 | 464,000 (3%) | 0% | 5.5 | 27,700 | Common Stock |
| Robert M. Averick | Director, Ten Percent Owner | Purchase of securities on an exchange or from another person at price $ 5.53 per share. | 09 Aug 2024 | 25,000 | 459,000 (3%) | 0% | 5.5 | 138,250 | Common Stock |
| Wade M. Jenke | Chief Financial Officer | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 08 Aug 2024 | 30,000 | 30,000 | - | - | Amtech Systems, Inc. Employee Stock Option | |
| Robert M. Averick | Director, Ten Percent Owner | Purchase of securities on an exchange or from another person at price $ 5.45 per share. | 10 May 2024 | 2,784 | 434,000 (3%) | 0% | 5.5 | 15,173 | Common Stock |
| Robert M. Averick | Director, Ten Percent Owner | Purchase of securities on an exchange or from another person at price $ 5.16 per share. | 10 May 2024 | 304 | 431,216 (2%) | 0% | 5.2 | 1,569 | Common Stock |
| Robert M. Averick | Director, Ten Percent Owner | Purchase of securities on an exchange or from another person at price $ 5.20 per share. | 10 May 2024 | 12,723 | 430,912 (2%) | 0% | 5.2 | 66,160 | Common Stock |
| Lisa D. Gibbs | Director, VP and Chief Financial Officer | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 15 Mar 2024 | 30,000 | 30,000 | - | - | Amtech Systems, Inc. Employee Stock Option | |
| Michael M. Ludwig | Director | Grant, award, or other acquisition of securities at price $ 4.73 per share. | 11 Mar 2024 | 2,000 | 16,689 (0%) | 0% | 4.7 | 9,460 | Amtech Systems, Inc. $0.01 par value common stock |
| Michael Garnreiter | Director | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 06 Mar 2024 | 8,299 | 8,299 | - | - | Restricted Stock Units | |
| Michael M. Ludwig | Director | Grant, award, or other acquisition of securities at price $ 4.85 per share. | 06 Mar 2024 | 6,000 | 13,189 (0%) | 0% | 4.9 | 29,117 | Amtech Systems, Inc. $0.01 par value common stock |
| Michael M. Ludwig | Director | Grant, award, or other acquisition of securities at price $ 4.91 per share. | 06 Mar 2024 | 1,500 | 14,689 (0%) | 0% | 4.9 | 7,365 | Amtech Systems, Inc. $0.01 par value common stock |
| Michael M. Ludwig | Director | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 06 Mar 2024 | 8,299 | 8,299 | - | - | Restricted Stock Units | |
| Robert M. Averick | Director, Ten Percent Owner | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 06 Mar 2024 | 8,299 | 8,299 | - | - | Restricted Stock Units | |
| Michael Garnreiter | Director | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 01 Mar 2024 | 4,189 | 22,189 (0%) | 0% | 0 | Amtech Systems, Inc. $0.01 par value common stock | |
| Michael Garnreiter | Director | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 01 Mar 2024 | 4,189 | 0 | - | - | Restricted Stock Units | |
| Michael M. Ludwig | Director | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 01 Mar 2024 | 4,189 | 0 | - | - | Restricted Stock Units | |
| Michael M. Ludwig | Director | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 01 Mar 2024 | 4,189 | 7,189 (0%) | 0% | 0 | Amtech Systems, Inc. $0.01 par value common stock | |
| Robert M. Averick | Director, Ten Percent Owner | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 01 Mar 2024 | 4,189 | 418,189 (2%) | 0% | 0 | Common Stock | |
| Robert M. Averick | Director, Ten Percent Owner | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 01 Mar 2024 | 4,189 | 0 | - | - | Restricted Stock Units | |
| Robert C. Daigle | Director, Chairman & CEO | Payment of exercise price or tax liability using portion of securities received from the company at price $ 4.83 per share. | 29 Feb 2024 | 2,603 | 105,453 (0%) | 0% | 4.8 | 12,572 | Amtech Systems, Inc. $0.01 par value common stock |
| Robert C. Daigle | Director, Chairman & CEO | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 29 Feb 2024 | 7,854 | 0 | - | - | Restricted Stock Units | |
| Robert C. Daigle | Director, Chairman & CEO | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 29 Feb 2024 | 400,000 | 400,000 | - | - | Amtech Systems, Inc. Employee Stock Option | |
| Robert C. Daigle | Director, Chairman & CEO | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 29 Feb 2024 | 7,854 | 108,056 (0%) | 0% | 0 | Amtech Systems, Inc. $0.01 par value common stock | |
| Robert Daigle C. | Director, Chairman & CEO | Purchase of securities on an exchange or from another person at price $ 4.21 per share. | 13 Feb 2024 | 3,500 | 103,702 (0%) | 0% | 4.2 | 14,735 | Amtech Systems, Inc. $0.01 par value common stock |
| Daigle Robert C. | Director, Chief Executive Officer | Purchase of securities on an exchange or from another person at price $ 3.90 per share. | 18 Dec 2023 | 20,000 | 100,202 (0%) | 0% | 3.9 | 78,000 | Amtech Systems, Inc. $0.01 par value common stock |
| Averick Robert M. | Director, Ten Percent Owner | Purchase of securities on an exchange or from another person at price $ 3.90 per share. | 18 Dec 2023 | 14,000 | 393,500 (2%) | 0% | 3.9 | 54,600 | Common Stock |
| Daigle C. Robert | Director, Chief Executive Officer | Purchase of securities on an exchange or from another person at price $ 3.96 per share. | 18 Dec 2023 | 46,000 | 80,202 (0%) | 0% | 4.0 | 182,160 | Amtech Systems, Inc. $0.01 par value common stock |
| Robert C. Daigle | Director, Chief Executive Officer | Purchase of securities on an exchange or from another person at price $ 8.59 per share. | 24 Aug 2023 | 8,250 | 30,202 (0%) | 0% | 8.6 | 70,868 | Amtech Systems, Inc. $0.01 par value common stock |
| Robert C. Daigle | Director, Chief Executive Officer | Purchase of securities on an exchange or from another person at price $ 8.60 per share. | 24 Aug 2023 | 4,000 | 34,202 (0%) | 0% | 8.6 | 34,400 | Amtech Systems, Inc. $0.01 par value common stock |
| Robert M. Averick | Director, Ten Percent Owner | Purchase of securities on an exchange or from another person at price $ 8.96 per share. | 17 Aug 2023 | 9,000 | 11,000 (0%) | 0% | 9.0 | 80,640 | Common Stock |
| Robert M. Averick | Director, Ten Percent Owner | Purchase of securities on an exchange or from another person at price $ 8.70 per share. | 17 Aug 2023 | 6,500 | 379,500 (2%) | 0% | 8.7 | 56,550 | Common Stock |
| Robert C. Daigle | Director, Chief Executive Officer | Purchase of securities on an exchange or from another person at price $ 8.75 per share. | 14 Aug 2023 | 233 | 19,703 (0%) | 0% | 8.8 | 2,039 | Amtech Systems, Inc. $0.01 par value common stock |
| Robert C. Daigle | Director, Chief Executive Officer | Purchase of securities on an exchange or from another person at price $ 9.00 per share. | 14 Aug 2023 | 49 | 21,952 (0%) | 0% | 9 | 441 | Amtech Systems, Inc. $0.01 par value common stock |
| Robert C. Daigle | Director, Chief Executive Officer | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 14 Aug 2023 | 55,556 | 55,556 | - | - | Restricted Stock Units | |
| Robert C. Daigle | Director, Chief Executive Officer | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 14 Aug 2023 | 150,000 | 150,000 | - | - | Amtech Systems, Inc. Employee Stock Option | |
| Robert C. Daigle | Director, Chief Executive Officer | Purchase of securities on an exchange or from another person at price $ 8.75 per share. | 14 Aug 2023 | 1,200 | 21,903 (0%) | 0% | 8.8 | 10,500 | Amtech Systems, Inc. $0.01 par value common stock |
| Robert C. Daigle | Director, Chief Executive Officer | Purchase of securities on an exchange or from another person at price $ 8.76 per share. | 14 Aug 2023 | 1,000 | 20,703 (0%) | 0% | 8.8 | 8,760 | Amtech Systems, Inc. $0.01 par value common stock |
| Robert C. Daigle | Director, Chief Executive Officer | Purchase of securities on an exchange or from another person at price $ 9.10 per share. | 11 Aug 2023 | 1,000 | 19,470 (0%) | 0% | 9.1 | 9,100 | Amtech Systems, Inc. $0.01 par value common stock |
| Robert C. Daigle | Director, Chief Executive Officer | Purchase of securities on an exchange or from another person at price $ 8.93 per share. | 11 Aug 2023 | 15,386 | 18,470 (0%) | 0% | 8.9 | 137,397 | Amtech Systems, Inc. $0.01 par value common stock |
| Robert M. Averick | Director, Ten Percent Owner | Purchase of securities on an exchange or from another person at price $ 8.88 per share. | 11 Aug 2023 | 7,500 | 373,000 (2%) | 0% | 8.9 | 66,600 | Common Stock |
| Michael Garnreiter | Director | Exercise or conversion of derivative security received from the company (such as an option) at price $ 7.01 per share. | 06 Jul 2023 | 6,000 | 18,000 (0%) | 0% | 7.0 | 42,060 | Amtech Systems, Inc. $0.01 par value common stock |
| Michael Garnreiter | Director | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 06 Jul 2023 | 6,000 | 0 | - | - | Amtech Systems, Inc. Non-Employee Director Stock Option | |
| Robert M. Averick | Director, Ten Percent Owner | Purchase of securities on an exchange or from another person at price $ 8.89 per share. | 23 May 2023 | 1,500 | 365,500 (2%) | 0% | 8.9 | 13,335 | Common Stock |
| Robert C. Daigle | Director | Purchase of securities on an exchange or from another person at price $ 8.75 per share. | 19 May 2023 | 84 | 3,084 (0%) | 0% | 8.8 | 735 | Amtech Systems, Inc. $0.01 par value common stock |
| Robert M. Averick | Director, Ten Percent Owner | Purchase of securities on an exchange or from another person at price $ 8.65 per share. | 16 May 2023 | 1,480 | 362,980 (2%) | 0% | 8.7 | 12,802 | Common Stock |
| Robert M. Averick | Director, Ten Percent Owner | Purchase of securities on an exchange or from another person at price $ 8.65 per share. | 16 May 2023 | 1,020 | 364,000 (2%) | 0% | 8.7 | 8,823 | Common Stock |
| Robert C. Daigle | Director | Purchase of securities on an exchange or from another person at price $ 8.75 per share. | 12 May 2023 | 3,000 | 3,000 (0%) | 0% | 8.8 | 26,250 | Amtech Systems, Inc. $0.01 par value common stock |
| Robert M. Averick | Director, Ten Percent Owner | Purchase of securities on an exchange or from another person at price $ 8.95 per share. | 12 May 2023 | 4,750 | 361,500 (2%) | 0% | 9.0 | 42,513 | Common Stock |
| Robert M. Averick | Director, Ten Percent Owner | Purchase of securities on an exchange or from another person at price $ 8.96 per share. | 10 Mar 2023 | 2,250 | 356,750 (2%) | 0% | 9.0 | 20,160 | Common Stock |
| Robert M. Averick | Director, Ten Percent Owner | Purchase of securities on an exchange or from another person at price $ 8.95 per share. | 10 Mar 2023 | 1,000 | 2,000 (0%) | 0% | 9.0 | 8,950 | Common Stock |
| Robert M. Averick | Director, Ten Percent Owner | Purchase of securities on an exchange or from another person at price $ 8.95 per share. | 10 Mar 2023 | 1,000 | 1,000 (0%) | 0% | 9.0 | 8,950 | Common Stock |
| Michael Garnreiter | Director | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 01 Mar 2023 | 4,189 | 4,189 | - | - | Restricted Stock Units | |
| Michael M. Ludwig | Director | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 01 Mar 2023 | 3,000 | 3,000 (0%) | 0% | 0 | Amtech Systems, Inc. $0.01 par value common stock | |
| Michael M. Ludwig | Director | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 01 Mar 2023 | 3,000 | 0 | - | - | Restricted Stock Units | |
| Michael M. Ludwig | Director | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 01 Mar 2023 | 4,189 | 4,189 | - | - | Restricted Stock Units | |
| Robert C. Daigle | Director | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 01 Mar 2023 | 7,854 | 7,854 | - | - | Restricted Stock Units | |
| Robert M. Averick | Director, Ten Percent Owner | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 01 Mar 2023 | 4,189 | 4,189 | - | - | Restricted Stock Units | |
| Robert M. Averick | Director, Ten Percent Owner | Purchase of securities on an exchange or from another person at price $ 9.05 per share. | 10 Feb 2023 | 4,500 | 354,500 (2%) | 0% | 9.1 | 40,725 | Common Stock |
| Michael M. Ludwig | Director | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 13 Jan 2023 | 3,000 | 3,000 | - | - | Restricted Stock Units | |
| Michael Whang | Director, Chief Executive Officer | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 01 Dec 2022 | 12,000 | 12,000 | - | - | Amtech Systems, Inc. Employee Stock Option | |
| Lisa D. Gibbs | Director, VP and Chief Financial Officer | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 01 Dec 2022 | 10,000 | 10,000 | - | - | Amtech Systems, Inc. Employee Stock Option | |
| Michael Whang | Director, Chief Executive Officer | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 28 Nov 2022 | 12,003 | 31,499 (0%) | 0% | 0 | Amtech Systems, Inc. $0.01 par value common stock | |
| Lisa D. Gibbs | Director, VP and Chief Financial Officer | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 28 Nov 2022 | 8,502 | 10,502 (0%) | 0% | 0 | Amtech Systems, Inc. $0.01 par value common stock | |
| Michael Garnreiter | Director | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 13 Oct 2022 | 6,000 | 0 | - | - | Amtech Systems, Inc. Non-Employee Director Stock Option | |
| Michael Garnreiter | Director | Exercise or conversion of derivative security received from the company (such as an option) at price $ 2.95 per share. | 13 Oct 2022 | 6,000 | 12,000 (0%) | 0% | 3.0 | 17,700 | Amtech Systems, Inc. $0.01 par value common stock |
| Robert M. Averick | Director, Ten Percent Owner | Purchase of securities on an exchange or from another person at price $ 10.96 per share. | 09 Sep 2022 | 3,399 | 350,000 (2%) | 0% | 11.0 | 37,253 | Common Stock |
| Robert M. Averick | Director, Ten Percent Owner | Purchase of securities on an exchange or from another person at price $ 10.96 per share. | 09 Sep 2022 | 1,211 | 346,601 (2%) | 0% | 11.0 | 13,273 | Common Stock |
| Robert M. Averick | Director, Ten Percent Owner | Purchase of securities on an exchange or from another person at price $ 10.51 per share. | 01 Sep 2022 | 4,991 | 344,991 (2%) | 0% | 10.5 | 52,455 | Common Stock |
| Robert M. Averick | Director, Ten Percent Owner | Purchase of securities on an exchange or from another person at price $ 10.56 per share. | 01 Sep 2022 | 399 | 345,390 (2%) | 0% | 10.6 | 4,213 | Common Stock |
| Michael Whang | Director, Chief Executive Officer | Exercise or conversion of derivative security received from the company (such as an option) at price $ 7.40 per share. | 24 Aug 2022 | 10,000 | 38,250 (0%) | 0% | 7.4 | 74,000 | Amtech Systems, Inc. $.01 par value common stock |
| Michael Whang | Director, Chief Executive Officer | Exercise or conversion of derivative security received from the company (such as an option) at price $ 4.77 per share. | 24 Aug 2022 | 10,000 | 12,000 (0%) | 0% | 4.8 | 47,700 | Amtech Systems, Inc. $.01 par value common stock |
| Michael Whang | Director, Chief Executive Officer | Exercise or conversion of derivative security received from the company (such as an option) at price $ 4.87 per share. | 24 Aug 2022 | 3,750 | 15,750 (0%) | 0% | 4.9 | 18,263 | Amtech Systems, Inc. $.01 par value common stock |
| Michael Whang | Director, Chief Executive Officer | Exercise or conversion of derivative security received from the company (such as an option) at price $ 5.52 per share. | 24 Aug 2022 | 7,500 | 23,250 (0%) | 0% | 5.5 | 41,400 | Amtech Systems, Inc. $.01 par value common stock |
| Michael Whang | Director, Chief Executive Officer | Exercise or conversion of derivative security received from the company (such as an option) at price $ 5.67 per share. | 24 Aug 2022 | 5,000 | 28,250 (0%) | 0% | 5.7 | 28,350 | Amtech Systems, Inc. $.01 par value common stock |
| Michael Whang | Director, Chief Executive Officer | Exercise or conversion of derivative security received from the company (such as an option) at price $ 9.98 per share. | 24 Aug 2022 | 5,000 | 43,250 (0%) | 0% | 10.0 | 49,900 | Amtech Systems, Inc. $.01 par value common stock |
| Michael Whang | Director, Chief Executive Officer | Sale of securities on an exchange or to another person at price $ 12.41 per share. | 24 Aug 2022 | 15,004 | 28,246 (0%) | 0% | 12.4 | 186,200 | Amtech Systems, Inc. $.01 par value common stock |
| Michael Whang | Director, Chief Executive Officer | Sale of securities on an exchange or to another person at price $ 12.78 per share. | 24 Aug 2022 | 8,750 | 19,496 (0%) | 0% | 12.8 | 111,825 | Amtech Systems, Inc. $.01 par value common stock |
| Michael Whang | Director, Chief Executive Officer | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 24 Aug 2022 | 10,000 | 0 | - | - | Amtech Systems, Inc. Employee Stock Option | |
| Michael Whang | Director, Chief Executive Officer | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 24 Aug 2022 | 3,750 | 0 | - | - | Amtech Systems, Inc. Employee Stock Option | |
| Michael Whang | Director, Chief Executive Officer | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 24 Aug 2022 | 7,500 | 0 | - | - | Amtech Systems, Inc. Employee Stock Option | |
| Michael Whang | Director, Chief Executive Officer | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 24 Aug 2022 | 10,000 | 0 | - | - | Amtech Systems, Inc. Employee Stock Option | |
| Michael Whang | Director, Chief Executive Officer | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 24 Aug 2022 | 5,000 | 0 | - | - | Amtech Systems, Inc. Employee Stock Option | |
| Michael Whang | Director, Chief Executive Officer | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 24 Aug 2022 | 5,000 | 10,000 | - | - | Amtech Systems, Inc. Employee Stock Option | |
| Jong S. Whang | Director | Exercise or conversion of derivative security received from the company (such as an option) at price $ 5.25 per share. | 23 Aug 2022 | 50,000 | 120,681 (0%) | 0% | 5.3 | 262,500 | Amtech Systems, Inc. $.01 par value common stock |
| Jong S. Whang | Director | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 23 Aug 2022 | 50,000 | 0 | - | - | Amtech Systems, Inc. Employee Stock Option | |
| Jong S. Whang | Director | Sale of securities on an exchange or to another person at price $ 13.07 per share. | 23 Aug 2022 | 50,000 | 70,681 (0%) | 0% | 13.1 | 653,500 | Amtech Systems, Inc. $.01 par value common stock |
| Robert M. Averick | Director, Ten Percent Owner | Purchase of securities on an exchange or from another person at price $ 7.71 per share. | 13 May 2022 | 15,000 | 315,000 (2%) | 0% | 7.7 | 115,650 | Common Stock |
| Robert M. Averick | Director, Ten Percent Owner | Purchase of securities on an exchange or from another person at price $ 8.02 per share. | 13 May 2022 | 25,000 | 340,000 (2%) | 0% | 8.0 | 200,500 | Common Stock |
| Michael Garnreiter | Director | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 02 Mar 2022 | 6,000 | 6,000 | - | - | Amtech Systems, Inc. Non-Employee Director Stock Option | |
| Robert C. Daigle | Director | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 02 Mar 2022 | 6,000 | 6,000 | - | - | Amtech Systems, Inc. Non-Employee Director Stock Option | |
| Robert M. Averick | Director, Ten Percent Owner | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 02 Mar 2022 | 6,000 | 6,000 | - | - | Director Stock Option (Right to Buy) | |
| Sukesh Mohan | Director | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 02 Mar 2022 | 6,000 | 6,000 | - | - | Amtech Systems, Inc. Non-Employee Director Stock Option | |
| Robert M. Averick | Director, Ten Percent Owner | Purchase of securities on an exchange or from another person at price $ 9.80 per share. | 22 Feb 2022 | 5,000 | 280,000 (1%) | 0% | 9.8 | 49,000 | Common Stock |
| Robert M. Averick | Director, Ten Percent Owner | Purchase of securities on an exchange or from another person at price $ 9.68 per share. | 22 Feb 2022 | 20,000 | 300,000 (2%) | 0% | 9.7 | 193,600 | Common Stock |
| Robert M. Averick | Director, Ten Percent Owner | Purchase of securities on an exchange or from another person at price $ 9.70 per share. | 22 Feb 2022 | 500 | 500 (0%) | 0% | 9.7 | 4,850 | Common Stock |
| Robert M. Averick | Director, Ten Percent Owner | Purchase of securities on an exchange or from another person at price $ 10.30 per share. | 22 Nov 2021 | 2,500 | 275,000 (1%) | 0% | 10.3 | 25,750 | Common Stock |
| Robert M. Averick | Director, Ten Percent Owner | Purchase of securities on an exchange or from another person at price $ 10.66 per share. | 22 Nov 2021 | 12,500 | 272,500 (1%) | 0% | 10.7 | 133,250 | Common Stock |
| Michael Whang | Director, Chief Executive Officer | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 16 Nov 2021 | 12,000 | 12,000 | - | - | Amtech Systems, Inc. Employee Stock Option | |
| Lisa D. Gibbs | Director, VP and Chief Financial Officer | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 16 Nov 2021 | 10,000 | 10,000 | - | - | Amtech Systems, Inc. Employee Stock Option | |
| Jong S. Whang | Director, Chairman | Sale of securities on an exchange or to another person at price $ 10.24 per share. | 08 Sep 2021 | 36,667 | 70,681 (0%) | 0% | 10.2 | 375,580 | Amtech Systems, Inc. $0.01 par value common stock |
| Jong S. Whang | Director, Chairman | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 08 Sep 2021 | 36,667 | 0 | - | - | Amtech Systems, Inc. Employee Stock Option | |
| Jong S. Whang | Director, Chairman | Exercise or conversion of derivative security received from the company (such as an option) at price $ 7.98 per share. | 08 Sep 2021 | 36,667 | 107,348 (0%) | 0% | 8.0 | 292,603 | Amtech Systems, Inc. $0.01 par value common stock |
| Michael Garnreiter | Director | Exercise or conversion of derivative security received from the company (such as an option) at price $ 7.98 per share. | 03 Sep 2021 | 6,000 | 6,000 (0%) | 0% | 8.0 | 47,880 | Amtech Systems, Inc. $0.01 par value common stock |
| Michael Garnreiter | Director | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 03 Sep 2021 | 6,000 | 0 | - | - | Amtech Systems, Inc. Non-Employee Director Stock Option | |
| Robert C. Daigle | Director | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 12 Aug 2021 | 6,000 | 6,000 | - | - | Amtech Systems, Inc. Non-Employee Director Stock Option | |
| Robert M. Averick | Director, Ten Percent Owner | Purchase of securities on an exchange or from another person at price $ 9.96 per share. | 11 Aug 2021 | 2,500 | 260,000 (1%) | 0% | 10.0 | 24,900 | Common Stock |
| Robert M. Averick | Director, Ten Percent Owner | Purchase of securities on an exchange or from another person at price $ 10.00 per share. | 06 Aug 2021 | 2,500 | 257,500 (1%) | 0% | 10 | 25,000 | Common Stock |
| Robert M. Averick | Director, Ten Percent Owner | Purchase of securities on an exchange or from another person at price $ 9.75 per share. | 06 Aug 2021 | 5,000 | 255,000 (1%) | 0% | 9.8 | 48,750 | Common Stock |
| Michael Garnreiter | Director | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 23 Mar 2021 | 6,000 | 6,000 | - | - | Amtech Systems, Inc. Non-Employee Director Stock Option | |
| Robert M. Averick | Director, Ten Percent Owner | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 23 Mar 2021 | 6,000 | 6,000 | - | - | Director Stock Option (Right to Buy) | |
| Sukesh Mohan | Director | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 23 Mar 2021 | 6,000 | 6,000 | - | - | Amtech Systems, Inc. Non-Employee Director Stock Option | |
| Robert F. King | Director | Exercise or conversion of derivative security received from the company (such as an option) at price $ 5.25 per share. | 03 Dec 2020 | 4,000 | 12,200 (0%) | 0% | 5.3 | 21,000 | Amtech Systems, Inc. $.01 par value common stock |
| Robert F. King | Director | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 03 Dec 2020 | 4,000 | 0 | - | - | Amtech Systems, Inc. Non-Employee Director Stock Option | |
| Robert F. King | Director | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 03 Dec 2020 | 6,000 | 0 | - | - | Amtech Systems, Inc. Non-Employee Director Stock Option | |
| Robert F. King | Director | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 03 Dec 2020 | 6,000 | 0 | - | - | Amtech Systems, Inc. Non-Employee Director Stock Option | |
| Robert F. King | Director | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 03 Dec 2020 | 4,000 | 0 | - | - | Amtech Systems, Inc. Non-Employee Director Stock Option | |
| Robert F. King | Director | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 03 Dec 2020 | 4,000 | 0 | - | - | Amtech Systems, Inc. Non-Employee Director Stock Option | |
| Robert F. King | Director | Sale of securities on an exchange or to another person at price $ 6.75 per share. | 03 Dec 2020 | 6,200 | 2,000 (0%) | 0% | 6.8 | 41,850 | Amtech Systems, Inc. $.01 par value common stock |
| Robert F. King | Director | Sale of securities on an exchange or to another person at price $ 6.90 per share. | 03 Dec 2020 | 24,000 | 8,200 (0%) | 0% | 6.9 | 165,600 | Amtech Systems, Inc. $.01 par value common stock |
| Robert F. King | Director | Exercise or conversion of derivative security received from the company (such as an option) at price $ 5.75 per share. | 03 Dec 2020 | 4,000 | 32,200 (0%) | 0% | 5.8 | 23,000 | Amtech Systems, Inc. $.01 par value common stock |
| Robert F. King | Director | Exercise or conversion of derivative security received from the company (such as an option) at price $ 4.90 per share. | 03 Dec 2020 | 6,000 | 28,200 (0%) | 0% | 4.9 | 29,400 | Amtech Systems, Inc. $.01 par value common stock |
| Robert F. King | Director | Exercise or conversion of derivative security received from the company (such as an option) at price $ 4.77 per share. | 03 Dec 2020 | 6,000 | 22,200 (0%) | 0% | 4.8 | 28,620 | Amtech Systems, Inc. $.01 par value common stock |
| Robert F. King | Director | Exercise or conversion of derivative security received from the company (such as an option) at price $ 2.95 per share. | 03 Dec 2020 | 4,000 | 16,200 (0%) | 0% | 3.0 | 11,800 | Amtech Systems, Inc. $.01 par value common stock |
| Jong S. Whang | Director, Executive Chairman | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 17 Nov 2020 | 15,000 | 15,000 | - | - | Amtech Systems, Inc. Employee Stock Option | |
| Michael Whang | Director, Chief Executive Officer | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 17 Nov 2020 | 15,000 | 15,000 | - | - | Amtech Systems, Inc. Employee Stock Option | |
| Lisa D. Gibbs | Director, VP and Chief Financial Officer | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 17 Nov 2020 | 15,000 | 15,000 | - | - | Amtech Systems, Inc. Employee Stock Option | |
| Robert M. Averick | Director, Ten Percent Owner | Purchase of securities on an exchange or from another person at price $ 5.00 per share. | 10 Aug 2020 | 50,000 | 250,000 (1%) | 0% | 5 | 250,000 | Common Stock |
| Jong S. Whang | Director, Executive Chairman | Purchase of securities on an exchange or from another person at price $ 3.90 per share. | 13 Mar 2020 | 5,115 | 70,681 (0%) | 0% | 3.9 | 19,927 | Amtech Systems, Inc. $0.01 par value common stock |
| Jong S. Whang | Director, Executive Chairman | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 10 Mar 2020 | 12,500 | 0 | - | - | Amtech Systems, Inc. Employee Stock Option | |
| Jong S. Whang | Director, Executive Chairman | Exercise or conversion of derivative security received from the company (such as an option) at price $ 2.95 per share. | 10 Mar 2020 | 12,500 | 65,566 (0%) | 0% | 3.0 | 36,875 | Amtech Systems, Inc. $0.01 par value common stock |
| Michael Garnreiter | Director | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 04 Mar 2020 | 6,000 | 6,000 | - | - | Amtech Systems, Inc. Non-Employee Director Stock Option | |
| Robert F. King | Director | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 04 Mar 2020 | 6,000 | 6,000 | - | - | Amtech Systems, Inc. Non-Employee Director Stock Option | |
| Robert M. Averick | Director, Ten Percent Owner | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 04 Mar 2020 | 6,000 | 6,000 | - | - | Director Stock Option (Right to Buy) | |
| Sukesh Mohan | Director | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 04 Mar 2020 | 6,000 | 6,000 | - | - | Amtech Systems, Inc. Non-Employee Director Stock Option | |
| Michael Whang | Chief Executive Officer | Purchase of securities on an exchange or from another person at price $ 5.00 per share. | 02 Mar 2020 | 2,000 | 2,000 (0%) | 0% | 5 | 10,000 | Amtech Systems, Inc. $0.01 par value common stock |
| Lisa D. Gibbs | VP and Chief Financial Officer | Purchase of securities on an exchange or from another person at price $ 4.95 per share. | 02 Mar 2020 | 2,000 | 2,000 (0%) | 0% | 5.0 | 9,900 | Amtech Systems, Inc. $0.01 par value common stock |
| Robert M. Averick | Director, Ten Percent Owner | Purchase of securities on an exchange or from another person at price $ 5.11 per share. | 25 Feb 2020 | 8,500 | 200,000 (1%) | 0% | 5.1 | 43,435 | Common Stock |
| Robert M. Averick | Director, Ten Percent Owner | Purchase of securities on an exchange or from another person at price $ 5.29 per share. | 10 Feb 2020 | 1,565 | 191,500 (1%) | 0% | 5.3 | 8,279 | Common Stock |
| Robert M. Averick | Director, Ten Percent Owner | Purchase of securities on an exchange or from another person at price $ 5.56 per share. | 10 Feb 2020 | 19,935 | 189,935 (1%) | 0% | 5.6 | 110,839 | Common Stock |
| Robert M. Averick | Director, Ten Percent Owner | Purchase of securities on an exchange or from another person at price $ 5.28 per share. | 28 Aug 2019 | 19,341 | 170,000 (1%) | 0% | 5.3 | 102,120 | Common Stock |
| Robert M. Averick | Director, Ten Percent Owner | Purchase of securities on an exchange or from another person at price $ 4.90 per share. | 28 Aug 2019 | 659 | 150,659 (1%) | 0% | 4.9 | 3,229 | Common Stock |
| Michael Garnreiter | None | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 06 Mar 2019 | 6,000 | 6,000 | - | - | Amtech Systems, Inc. Non-Employee Director Stock Option | |
| Robert F. King | None | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 06 Mar 2019 | 6,000 | 6,000 | - | - | Amtech Systems, Inc. Non-Employee Director Stock Option | |
| Robert M. Averick | Director, Ten Percent Owner | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 06 Mar 2019 | 6,000 | 6,000 | - | - | Director Stock Option (Right to Buy) | |
| Sukesh Mohan | None | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 06 Mar 2019 | 6,000 | 6,000 | - | - | Amtech Systems, Inc. Non-Employee Director Stock Option | |
| Michael Whang | Chief Operating Officer | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 06 Mar 2019 | 10,000 | 10,000 | - | - | Amtech Systems, Inc. Employee Stock Option | |
| Lisa D. Gibbs | VP & Chief Financial Officer | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 06 Mar 2019 | 10,000 | 10,000 | - | - | Amtech Systems, Inc. Employee Stock Option | |
| Robert T. Hass | CFO | Exercise or conversion of derivative security received from the company (such as an option) at price $ 3.80 per share. | 06 Dec 2018 | 3,884 | 5,466 (0%) | 0% | 3.8 | 14,759 | Common Stock |
| Robert T. Hass | CFO | Sale of securities on an exchange or to another person at price $ 5.10 per share. | 06 Dec 2018 | 3,884 | 1,582 (0%) | 0% | 5.1 | 19,804 | Common Stock |
| Robert T. Hass | CFO | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 06 Dec 2018 | 3,884 | 0 | - | - | Stock Options (right to buy) | |
| Jong S. Whang | Director, Executive Chairman | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 27 Nov 2018 | 25,000 | 25,000 | - | - | Amtech Systems, Inc. Employee Stock Option | |
| Robert T. Hass | CFO | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 27 Nov 2018 | 17,500 | 17,500 | - | - | Amtech Systems, Inc. Employee Stock Option | |
| Michael Whang | Vice President of Operations | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 27 Nov 2018 | 7,500 | 7,500 | - | - | Amtech Systems, Inc. Employee Stock Option | |
| Lisa D. Gibbs | VP & Chief Accounting Officer | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 27 Nov 2018 | 7,500 | 7,500 | - | - | Amtech Systems, Inc. Employee Stock Option | |
| Fokko Pentinga | Director, President and CEO | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 01 Jun 2018 | 16,830 | 0 | - | - | Amtech Systems, Inc. Employee Stock Option | |
| Fokko Pentinga | Director, President and CEO | Sale of securities on an exchange or to another person at price $ 9.92 per share. | 01 Jun 2018 | 16,830 | 15,000 (0%) | 0% | 9.9 | 166,878 | Amtech Systems, Inc. $.01 par value common stock |
| Fokko Pentinga | Director, President and CEO | Exercise or conversion of derivative security received from the company (such as an option) at price $ 3.80 per share. | 01 Jun 2018 | 16,830 | 31,830 (0%) | 0% | 3.8 | 63,954 | Amtech Systems, Inc. $.01 par value common stock |
| Michael Whang | Vice President of Operations | Exercise or conversion of derivative security received from the company (such as an option) at price $ 7.01 per share. | 01 Jun 2018 | 5,000 | 5,000 (0%) | 0% | 7.0 | 35,050 | Amtech Systems, Inc. $.01 par value common stock |
| Michael Whang | Vice President of Operations | Sale of securities on an exchange or to another person at price $ 10.01 per share. | 01 Jun 2018 | 5,000 | 0 (0%) | 0% | 10.0 | 50,050 | Amtech Systems, Inc. $.01 par value common stock |
| Michael Whang | Vice President of Operations | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 01 Jun 2018 | 5,000 | 0 | - | - | Amtech Systems, Inc. Employee Stock Option | |
| Fokko Pentinga | Director, President and CEO | Sale of securities on an exchange or to another person at price $ 10.22 per share. | 31 May 2018 | 1,920 | 15,000 (0%) | 0% | 10.2 | 19,622 | Amtech Systems, Inc. $.01 par value common stock |
| Fokko Pentinga | Director, President and CEO | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 31 May 2018 | 1,920 | 16,830 | - | - | Amtech Systems, Inc. Employee Stock Option | |
| Fokko Pentinga | Director, President and CEO | Exercise or conversion of derivative security received from the company (such as an option) at price $ 3.80 per share. | 31 May 2018 | 1,920 | 16,920 (0%) | 0% | 3.8 | 7,296 | Amtech Systems, Inc. $.01 par value common stock |
| Michael Garnreiter | None | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 11 May 2018 | 6,000 | 6,000 | - | - | Amtech Systems, Inc. Non-Employee Director Stock Option | |
| Robert F. King | None | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 11 May 2018 | 6,000 | 6,000 | - | - | Amtech Systems, Inc. Non-Employee Director Stock Option | |
| Robert M. Averick | Director, Ten Percent Owner | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 11 May 2018 | 6,000 | 6,000 | - | - | Director Stock Option (Right to Buy) | |
| Sukesh Mohan | None | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 11 May 2018 | 6,000 | 6,000 | - | - | Amtech Systems, Inc. Non-Employee Director Stock Option | |
| Michael Whang | Vice President of Operations | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 11 May 2018 | 10,000 | 10,000 | - | - | Amtech Systems, Inc. Employee Stock Option | |
| Lisa D. Gibbs | VP & Chief Accounting Officer | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 11 May 2018 | 10,000 | 10,000 | - | - | Amtech Systems, Inc. Employee Stock Option | |
| Robert F. King | None | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 18 Jan 2018 | 2,000 | 4,000 | - | - | Amtech Systems, Inc. Non-Employee Director Stock Option | |
| Robert F. King | None | Exercise or conversion of derivative security received from the company (such as an option) at price $ 2.95 per share. | 18 Jan 2018 | 2,000 | 10,200 (0%) | 0% | 3.0 | 5,900 | Amtech Systems, Inc. $.01 par value common stock |
| Robert F. King | None | Exercise or conversion of derivative security received from the company (such as an option) at price $ 6.15 per share. | 18 Jan 2018 | 1,666 | 11,866 (0%) | 0% | 6.2 | 10,246 | Amtech Systems, Inc. $.01 par value common stock |
| Robert F. King | None | Exercise or conversion of derivative security received from the company (such as an option) at price $ 7.01 per share. | 18 Jan 2018 | 2,000 | 13,866 (0%) | 0% | 7.0 | 14,020 | Amtech Systems, Inc. $.01 par value common stock |
| Robert F. King | None | Exercise or conversion of derivative security received from the company (such as an option) at price $ 11.05 per share. | 18 Jan 2018 | 5,000 | 18,866 (0%) | 0% | 11.1 | 55,250 | Amtech Systems, Inc. $.01 par value common stock |
| Robert F. King | None | Exercise or conversion of derivative security received from the company (such as an option) at price $ 7.98 per share. | 18 Jan 2018 | 1,033 | 19,899 (0%) | 0% | 8.0 | 8,243 | Amtech Systems, Inc. $.01 par value common stock |
| Robert F. King | None | Exercise or conversion of derivative security received from the company (such as an option) at price $ 9.98 per share. | 18 Jan 2018 | 2,000 | 21,899 (0%) | 0% | 10.0 | 19,960 | Amtech Systems, Inc. $.01 par value common stock |
| Robert F. King | None | Exercise or conversion of derivative security received from the company (such as an option) at price $ 5.25 per share. | 18 Jan 2018 | 2,000 | 23,899 (0%) | 0% | 5.3 | 10,500 | Amtech Systems, Inc. $.01 par value common stock |
| Robert F. King | None | Exercise or conversion of derivative security received from the company (such as an option) at price $ 5.75 per share. | 18 Jan 2018 | 2,000 | 25,899 (0%) | 0% | 5.8 | 11,500 | Amtech Systems, Inc. $.01 par value common stock |
| Robert F. King | None | Sale of securities on an exchange or to another person at price $ 11.25 per share. | 18 Jan 2018 | 17,699 | 8,200 (0%) | 0% | 11.3 | 199,114 | Amtech Systems, Inc. $.01 par value common stock |
| Robert F. King | None | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 18 Jan 2018 | 2,000 | 4,000 | - | - | Amtech Systems, Inc. Non-Employee Director Stock Option | |
| Robert F. King | None | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 18 Jan 2018 | 2,000 | 4,000 | - | - | Amtech Systems, Inc. Non-Employee Director Stock Option | |
| Robert F. King | None | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 18 Jan 2018 | 1,033 | 2,067 | - | - | Amtech Systems, Inc. Non-Employee Director Stock Option | |
| Robert F. King | None | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 18 Jan 2018 | 5,000 | 0 | - | - | Amtech Systems, Inc. Non-Employee Director Stock Option | |
| Robert F. King | None | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 18 Jan 2018 | 2,000 | 4,000 | - | - | Amtech Systems, Inc. Non-Employee Director Stock Option | |
| Robert F. King | None | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 18 Jan 2018 | 1,666 | 3,334 | - | - | Amtech Systems, Inc. Non-Employee Director Stock Option | |
| Robert F. King | None | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 18 Jan 2018 | 2,000 | 4,000 | - | - | Amtech Systems, Inc. Non-Employee Director Stock Option | |
| Michael Garnreiter | None | Sale of securities on an exchange or to another person at price $ 10.00 per share. | 13 Dec 2017 | 5,000 | 0 (0%) | 0% | 10 | 50,000 | Amtech Systems, Inc. $.01 par value common stock |
| Michael Garnreiter | None | Exercise or conversion of derivative security received from the company (such as an option) at price $ 3.30 per share. | 13 Dec 2017 | 5,000 | 5,000 (0%) | 0% | 3.3 | 16,500 | Amtech Systems, Inc. $.01 par value common stock |
| Michael Garnreiter | None | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 13 Dec 2017 | 5,000 | 0 | - | - | Amtech Systems, Inc. Non-Employee Director Stock Option | |
| Paul J. Van Der Wansem | None | Gift of securities by or to the insider at price $ 0.00 per share. | 13 Dec 2017 | 6,583 | 272,924 (1%) | 0% | 0 | Common Stock | |
| Paul J. Van Der Wansem | None | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 13 Dec 2017 | 4,113 | 0 | - | - | Stock Options (right to buy) | |
| Paul J. Van Der Wansem | None | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 13 Dec 2017 | 8,227 | 0 | - | - | Stock Options (right to buy) | |
| Paul J. Van Der Wansem | None | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 13 Dec 2017 | 6,000 | 0 | - | - | Stock Options (right to buy) | |
| Paul J. Van Der Wansem | None | Sale of securities on an exchange or to another person at price $ 9.99 per share. | 13 Dec 2017 | 11,459 | 279,507 (1%) | 0% | 10.0 | 114,475 | Common Stock |
| Paul J. Van Der Wansem | None | Exercise or conversion of derivative security received from the company (such as an option) at price $ 5.75 per share. | 13 Dec 2017 | 6,000 | 290,966 (1%) | 0% | 5.8 | 34,500 | Common Stock |
| Paul J. Van Der Wansem | None | Exercise or conversion of derivative security received from the company (such as an option) at price $ 6.08 per share. | 13 Dec 2017 | 8,227 | 284,966 (1%) | 0% | 6.1 | 50,020 | Common Stock |
| Paul J. Van Der Wansem | None | Exercise or conversion of derivative security received from the company (such as an option) at price $ 7.15 per share. | 13 Dec 2017 | 4,113 | 276,739 (1%) | 0% | 7.2 | 29,408 | Common Stock |
| Jong S. Whang | Director, Executive Chairman | Sale of securities on an exchange or to another person at price $ 12.54 per share. | 27 Nov 2017 | 18,600 | 53,066 (0%) | 0% | 12.5 | 233,244 | Amtech Systems, Inc. $.01 par value common stock |
| Paul J. Van Der Wansem | None | Sale of securities on an exchange or to another person at price $ 12.98 per share. | 22 Nov 2017 | 980 | 25,676 (0%) | 0% | 13.0 | 12,720 | Common Stock |
| Paul J. Van Der Wansem | None | Sale of securities on an exchange or to another person at price $ 13.04 per share. | 22 Nov 2017 | 50,662 | 279,537 (1%) | 0% | 13.0 | 660,632 | Common Stock |
| Paul J. Van Der Wansem | None | Sale of securities on an exchange or to another person at price $ 12.98 per share. | 22 Nov 2017 | 807 | 37,039 (0%) | 0% | 13.0 | 10,475 | Common Stock |
| Paul J. Van Der Wansem | None | Sale of securities on an exchange or to another person at price $ 13.05 per share. | 22 Nov 2017 | 6,762 | 30,277 (0%) | 0% | 13.0 | 88,244 | Common Stock |
| Paul J. Van Der Wansem | None | Sale of securities on an exchange or to another person at price $ 12.97 per share. | 22 Nov 2017 | 2,970 | 22,706 (0%) | 0% | 13.0 | 38,521 | Common Stock |
| Paul J. Van Der Wansem | None | Sale of securities on an exchange or to another person at price $ 13.05 per share. | 22 Nov 2017 | 5,692 | 14,137 (0%) | 0% | 13.1 | 74,281 | Common Stock |
| Paul J. Van Der Wansem | None | Gift of securities by or to the insider at price $ 0.00 per share. | 22 Nov 2017 | 6,911 | 325,445 (2%) | 0% | 0 | Common Stock | |
| Paul J. Van Der Wansem | None | Sale of securities on an exchange or to another person at price $ 12.98 per share. | 22 Nov 2017 | 2,157 | 323,288 (2%) | 0% | 13.0 | 27,998 | Common Stock |
| Paul J. Van Der Wansem | None | Sale of securities on an exchange or to another person at price $ 13.04 per share. | 22 Nov 2017 | 50,662 | 272,626 (1%) | 0% | 13.0 | 660,632 | Common Stock |
| Paul J. Van Der Wansem | None | Sale of securities on an exchange or to another person at price $ 12.98 per share. | 22 Nov 2017 | 807 | 37,039 (0%) | 0% | 13.0 | 10,475 | Common Stock |
| Paul J. Van Der Wansem | None | Sale of securities on an exchange or to another person at price $ 13.05 per share. | 22 Nov 2017 | 6,762 | 30,277 (0%) | 0% | 13.0 | 88,244 | Common Stock |
| Paul J. Van Der Wansem | None | Sale of securities on an exchange or to another person at price $ 12.98 per share. | 22 Nov 2017 | 980 | 25,676 (0%) | 0% | 13.0 | 12,720 | Common Stock |
| Paul J. Van Der Wansem | None | Sale of securities on an exchange or to another person at price $ 12.97 per share. | 22 Nov 2017 | 2,970 | 22,706 (0%) | 0% | 13.0 | 38,521 | Common Stock |
| Paul J. Van Der Wansem | None | Sale of securities on an exchange or to another person at price $ 12.98 per share. | 22 Nov 2017 | 2,157 | 330,199 (2%) | 0% | 13.0 | 27,998 | Common Stock |
| Robert F. King | None | Sale of securities on an exchange or to another person at price $ 8.65 per share. | 07 Jun 2017 | 1,800 | 8,200 (0%) | 0% | 8.7 | 15,570 | Amtech Systems, Inc. $.01 par value common stock |
| Robert F. King | None | Exercise or conversion of derivative security received from the company (such as an option) at price $ 7.98 per share. | 07 Jun 2017 | 2,900 | 12,900 (0%) | 0% | 8.0 | 23,142 | Amtech Systems, Inc. $.01 par value common stock |
| Robert F. King | None | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 07 Jun 2017 | 2,900 | 0 | - | - | Amtech Systems, Inc. Non-Employee Director Stock Option | |
| Robert F. King | None | Sale of securities on an exchange or to another person at price $ 8.70 per share. | 07 Jun 2017 | 2,900 | 10,000 (0%) | 0% | 8.7 | 25,230 | Amtech Systems, Inc. $.01 par value common stock |
| Robert M. Averick | Director, Ten Percent Owner | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 17 Mar 2017 | 6,000 | 6,000 | - | - | Director Stock Option (Right to Buy) | |
| Paul J. Van Der Wansem | None | Sale of securities on an exchange or to another person at price $ 6.29 per share. | 15 Feb 2017 | 3,075 | 26,656 (0%) | 0% | 6.3 | 19,332 | Common Stock |
| Paul J. Van Der Wansem | None | Sale of securities on an exchange or to another person at price $ 6.23 per share. | 15 Feb 2017 | 4,937 | 332,356 (2%) | 0% | 6.2 | 30,773 | Common Stock |
| Robert T. Hass | CFO | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 10 Nov 2016 | 10,000 | 10,000 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Robert M. Averick | Director, Ten Percent Owner | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 15 Jan 2016 | 6,000 | 6,000 | - | - | Director Stock Option (Right to Buy) | |
| Jong S. Whang | Director, Executive Chairman | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 17 Nov 2015 | 50,000 | 50,000 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Paul J. Van Der Wansem | Director, See Remarks | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 17 Nov 2015 | 6,000 | 6,000 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Michael Garnreiter | None | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 17 Nov 2015 | 6,000 | 6,000 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Bradley C. Anderson | Chief Financial Officer | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 17 Nov 2015 | 35,000 | 35,000 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Robert F. King | None | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 17 Nov 2015 | 6,000 | 6,000 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Goudena J. G. Egbert | None | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 17 Nov 2015 | 6,000 | 6,000 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Fokko Pentinga | Director, President and CEO | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 17 Nov 2015 | 50,000 | 50,000 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Sukesh Mohan | None | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 17 Nov 2015 | 6,000 | 6,000 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Paul J. Van Der Wansem | Director, See Remarks | 30 Sep 2015 | 1,645 | 118,477 | - | - | Common Stock | ||
| Paul J. Van Der Wansem | Director, See Remarks | 30 Sep 2015 | 2 | 337,293 | - | - | Common Stock | ||
| Paul J. Van Der Wansem | Director, See Remarks | 30 Sep 2015 | 2 | 29,731 | - | - | Common Stock | ||
| Paul J. Van Der Wansem | Director, See Remarks | 30 Sep 2015 | 1 | 37,846 | - | - | Common Stock | ||
| Paul J. Van Der Wansem | Director, See Remarks | 30 Sep 2015 | 1 | 118,476 | - | - | Common Stock | ||
| Robert F. King | None | Purchase of securities on an exchange or from another person at price $ 0.00 per share. | 15 Sep 2015 | 2,000 | 10,000 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Jong S. Whang | Director, Executive Chairman | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 26 May 2015 | 6,250 | 12,500 | - | - | Amtech Systems, Inc. Employee Stock Option | |
| Jong S. Whang | Director, Executive Chairman | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 26 May 2015 | 10,000 | 10,000 | - | - | Amtech Systems, Inc. Employee Stock Option | |
| Jong S. Whang | Director, Executive Chairman | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 26 May 2015 | 13,750 | 16,250 | - | - | Amtech Systems, Inc. Employee Stock Option | |
| Jong S. Whang | Director, Executive Chairman | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 26 May 2015 | 6,250 | 47,916 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Jong S. Whang | Director, Executive Chairman | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 26 May 2015 | 10,000 | 57,916 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Jong S. Whang | Director, Executive Chairman | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 26 May 2015 | 13,750 | 71,666 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Bradley C. Anderson | Chief Financial Officer | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 22 May 2015 | 5,002 | 0 | - | - | Amtech Systems, Inc. Employee Stock Option | |
| Bradley C. Anderson | Chief Financial Officer | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 22 May 2015 | 5,000 | 0 | - | - | Amtech Systems, Inc. Employee Stock Option | |
| Bradley C. Anderson | Chief Financial Officer | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 22 May 2015 | 10,000 | 0 | - | - | Amtech Systems, Inc. Employee Stock Option | |
| Bradley C. Anderson | Chief Financial Officer | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 22 May 2015 | 5,002 | 45,059 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Bradley C. Anderson | Chief Financial Officer | Sale of securities on an exchange or to another person at price $ 0.00 per share. | 22 May 2015 | 5,002 | 40,057 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Bradley C. Anderson | Chief Financial Officer | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 22 May 2015 | 5,000 | 45,057 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Bradley C. Anderson | Chief Financial Officer | Sale of securities on an exchange or to another person at price $ 0.00 per share. | 22 May 2015 | 5,000 | 40,057 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Bradley C. Anderson | Chief Financial Officer | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 22 May 2015 | 10,000 | 50,057 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Bradley C. Anderson | Chief Financial Officer | Sale of securities on an exchange or to another person at price $ 0.00 per share. | 22 May 2015 | 10,000 | 40,057 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Fokko Pentinga | Director, President and CEO | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 22 May 2015 | 16,250 | 0 | - | - | Amtech Systems, Inc. Employee Stock Option | |
| Fokko Pentinga | Director, President and CEO | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 22 May 2015 | 16,250 | 42,947 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Fokko Pentinga | Director, President and CEO | Sale of securities on an exchange or to another person at price $ 0.00 per share. | 22 May 2015 | 16,250 | 26,697 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Fokko Pentinga | Director, President and CEO | Sale of securities on an exchange or to another person at price $ 0.00 per share. | 22 May 2015 | 11,697 | 15,000 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Jong S. Whang | Director, Executive Chairman | Sale of securities on an exchange or to another person at price $ 0.00 per share. | 20 May 2015 | 65,613 | 41,666 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Schreyer J Leslie | Ten Percent Owner | Purchase of securities on an exchange or from another person at price $ 0.00 per share. | 19 May 2015 | 50,000 | 1,386,312 | - | - | Common Stock | |
| Schreyer J Leslie | Ten Percent Owner | Purchase of securities on an exchange or from another person at price $ 0.00 per share. | 17 Apr 2015 | 25,000 | 1,336,312 | - | - | Common Stock | |
| Sukesh Mohan | None | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 09 Apr 2015 | 6,000 | 6,000 | - | - | Amtech Systems, Inc. Non-Employee Director Stock Option | |
| Schreyer J Leslie | Ten Percent Owner | Purchase of securities on an exchange or from another person at price $ 0.00 per share. | 27 Mar 2015 | 100,000 | 1,261,312 | - | - | Common Stock | |
| Schreyer J Leslie | Ten Percent Owner | Purchase of securities on an exchange or from another person at price $ 0.00 per share. | 27 Mar 2015 | 50,000 | 1,311,312 | - | - | Common Stock | |
| Schreyer J Leslie | Ten Percent Owner | Purchase of securities on an exchange or from another person at price $ 0.00 per share. | 13 Mar 2015 | 5,562 | 1,161,312 | - | - | Common Stock | |
| Schreyer J Leslie | Ten Percent Owner | Purchase of securities on an exchange or from another person at price $ 0.00 per share. | 11 Mar 2015 | 20,000 | 1,125,750 | - | - | Common Stock | |
| Schreyer J Leslie | Ten Percent Owner | Purchase of securities on an exchange or from another person at price $ 0.00 per share. | 11 Mar 2015 | 30,000 | 1,155,750 | - | - | Common Stock | |
| Schreyer J Leslie | Ten Percent Owner | Purchase of securities on an exchange or from another person at price $ 0.00 per share. | 05 Mar 2015 | 25,000 | 1,105,750 | - | - | Common Stock | |
| Schreyer J Leslie | Ten Percent Owner | Purchase of securities on an exchange or from another person at price $ 0.00 per share. | 02 Mar 2015 | 34,000 | 1,080,750 | - | - | Common Stock | |
| Schreyer J Leslie | Ten Percent Owner | Purchase of securities on an exchange or from another person at price $ 0.00 per share. | 23 Feb 2015 | 25,000 | 1,021,750 | - | - | Common Stock | |
| Schreyer J Leslie | Ten Percent Owner | Purchase of securities on an exchange or from another person at price $ 0.00 per share. | 23 Feb 2015 | 25,000 | 1,046,750 | - | - | Common Stock | |
| Paul J. Van Der Wansem | Director, See Remarks | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 30 Jan 2015 | 21,720 | 21,720 | - | - | Stock Options (right to buy) | |
| Paul J. Van Der Wansem | Director, See Remarks | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 30 Jan 2015 | 10,860 | 10,860 | - | - | Stock Options (right to buy) | |
| Paul J. Van Der Wansem | Director, See Remarks | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 30 Jan 2015 | 10,860 | 10,860 | - | - | Stock Options (right to buy) | |
| Paul J. Van Der Wansem | Director, See Remarks | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 30 Jan 2015 | 16,455 | 16,455 | - | - | Stock Options (right to buy) | |
| Paul J. Van Der Wansem | Director, See Remarks | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 30 Jan 2015 | 11,518 | 11,518 | - | - | Stock Options (right to buy) | |
| Paul J. Van Der Wansem | Director, See Remarks | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 30 Jan 2015 | 11,518 | 11,518 | - | - | Stock Options (right to buy) | |
| Paul J. Van Der Wansem | Director, See Remarks | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 30 Jan 2015 | 6,911 | 6,911 | - | - | Stock Options (right to buy) | |
| Paul J. Van Der Wansem | Director, See Remarks | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 30 Jan 2015 | 6,911 | 6,911 | - | - | Stock Options (right to buy) | |
| Paul J. Van Der Wansem | Director, See Remarks | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 30 Jan 2015 | 8,227 | 8,277 | - | - | Stock Options (right to buy) | |
| Paul J. Van Der Wansem | Director, See Remarks | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 30 Jan 2015 | 8,227 | 8,277 | - | - | Stock Options (right to buy) | |
| Paul J. Van Der Wansem | Director, See Remarks | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 30 Jan 2015 | 4,113 | 4,113 | - | - | Stock Options (right to buy) | |
| Paul J. Van Der Wansem | Director, See Remarks | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 30 Jan 2015 | 5,923 | 5,923 | - | - | Stock Options (right to buy) | |
| Paul J. Van Der Wansem | Director, See Remarks | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 30 Jan 2015 | 30,000 | 30,000 | - | - | Stock Options (right to buy) | |
| Paul J. Van Der Wansem | Director, See Remarks | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 30 Jan 2015 | 337,295 | 337,295 | - | - | Common Stock | |
| Paul J. Van Der Wansem | Director, See Remarks | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 30 Jan 2015 | 120,122 | 120,122 | - | - | Common Stock | |
| Paul J. Van Der Wansem | Director, See Remarks | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 30 Jan 2015 | 37,847 | 37,847 | - | - | Common Stock | |
| Paul J. Van Der Wansem | Director, See Remarks | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 30 Jan 2015 | 29,733 | 29,733 | - | - | Common Stock | |
| Robert M. Averick | Ten Percent Owner | Purchase of securities on an exchange or from another person at price $ 0.00 per share. | 23 Jan 2015 | 4,500 | 144,500 | - | - | Common Stock | |
| Robert M. Averick | Ten Percent Owner | Purchase of securities on an exchange or from another person at price $ 0.00 per share. | 23 Jan 2015 | 807 | 145,307 | - | - | Common Stock | |
| Robert M. Averick | Ten Percent Owner | Purchase of securities on an exchange or from another person at price $ 0.00 per share. | 23 Jan 2015 | 4,693 | 150,000 | - | - | Common Stock | |
| Robert M. Averick | Ten Percent Owner | Purchase of securities on an exchange or from another person at price $ 0.00 per share. | 24 Dec 2014 | 6,497 | 140,000 | - | - | Common Stock | |
| Robert M. Averick | Ten Percent Owner | Purchase of securities on an exchange or from another person at price $ 0.00 per share. | 16 Dec 2014 | 8,503 | 133,503 | - | - | Common Stock | |
| Schreyer J Leslie | Ten Percent Owner | Purchase of securities on an exchange or from another person at price $ 0.00 per share. | 26 Nov 2014 | 100,000 | 891,750 | - | - | Common Stock | |
| Jong S. Whang | Director, Executive Chairman | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 19 Nov 2014 | 50,000 | 50,000 | - | - | Amtech Systems, Inc. Employee Stock Option | |
| Michael Garnreiter | None | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 19 Nov 2014 | 6,000 | 6,000 | - | - | Amtech Systems, Inc. Non-Employee Director Stock Option | |
| Bradley C. Anderson | Chief Financial Officer | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 19 Nov 2014 | 35,000 | 35,000 | - | - | Amtech Systems, Inc. Employee Stock Option | |
| Robert F. King | None | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 19 Nov 2014 | 6,000 | 6,000 | - | - | Amtech Systems, Inc. Non-Employee Director Stock Option | |
| Alfred W. Giese | None | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 19 Nov 2014 | 6,000 | 6,000 | - | - | Amtech Systems, Inc. Non-Employee Director Stock Option | |
| Goudena J. G. Egbert | None | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 19 Nov 2014 | 6,000 | 6,000 | - | - | Amtech Systems, Inc. Non-Employee Director Stock Option | |
| Fokko Pentinga | Director, President and CEO | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 19 Nov 2014 | 50,000 | 50,000 | - | - | Amtech Systems, Inc. Employee Stock Option | |
| Robert M. Averick | Ten Percent Owner | Purchase of securities on an exchange or from another person at price $ 0.00 per share. | 06 Oct 2014 | 15,000 | 125,000 | - | - | Common Stock | |
| Robert M. Averick | Ten Percent Owner | Purchase of securities on an exchange or from another person at price $ 0.00 per share. | 06 Aug 2014 | 2,500 | 110,000 | - | - | Common Stock | |
| Robert M. Averick | Ten Percent Owner | Purchase of securities on an exchange or from another person at price $ 0.00 per share. | 20 May 2014 | 1,800 | 101,800 | - | - | Common Stock | |
| Robert M. Averick | Ten Percent Owner | Purchase of securities on an exchange or from another person at price $ 0.00 per share. | 20 May 2014 | 5,700 | 107,500 | - | - | Common Stock | |
| Alfred W. Giese | None | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 14 Mar 2014 | 4,000 | 5,520 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Alfred W. Giese | None | Sale or transfer of securities back to the company at price $ 0.00 per share. | 14 Mar 2014 | 4,000 | 2,000 | - | - | Amtech Systems, Inc. Non-Employee Director Stock Option | |
| Alfred W. Giese | None | Sale of securities on an exchange or to another person at price $ 0.00 per share. | 14 Mar 2014 | 4,000 | 1,520 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Robert F. King | None | Sale of securities on an exchange or to another person at price $ 0.00 per share. | 06 Mar 2014 | 2,000 | 8,000 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Bradley C. Anderson | Chief Financial Officer | Sale of securities on an exchange or to another person at price $ 0.00 per share. | 05 Mar 2014 | 5,709 | 40,057 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Alfred W. Giese | None | Sale of securities on an exchange or to another person at price $ 0.00 per share. | 05 Mar 2014 | 5,000 | 1,520 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Alfred W. Giese | None | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 05 Mar 2014 | 5,000 | 6,520 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Alfred W. Giese | None | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 05 Mar 2014 | 50 | 5,950 | - | - | Amtech Systems, Inc. Non-Employee Director Stock Option | |
| Alfred W. Giese | None | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 05 Mar 2014 | 50 | 1,570 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Alfred W. Giese | None | Sale of securities on an exchange or to another person at price $ 0.00 per share. | 05 Mar 2014 | 50 | 1,520 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Alfred W. Giese | None | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 05 Mar 2014 | 5,000 | 0 | - | - | Amtech Systems, Inc. Non-Employee Director Stock Option | |
| Alfred W. Giese | None | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 03 Mar 2014 | 3,333 | 4,853 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Alfred W. Giese | None | Sale of securities on an exchange or to another person at price $ 0.00 per share. | 03 Mar 2014 | 3,333 | 1,520 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Alfred W. Giese | None | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 03 Mar 2014 | 3,333 | 0 | - | - | Amtech Systems, Inc. Non-Employee Director Stock Option | |
| Fokko Pentinga | Director, President and CEO | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 03 Mar 2014 | 10,000 | 36,697 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Fokko Pentinga | Director, President and CEO | Sale of securities on an exchange or to another person at price $ 0.00 per share. | 03 Mar 2014 | 4,000 | 30,697 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Fokko Pentinga | Director, President and CEO | Sale of securities on an exchange or to another person at price $ 0.00 per share. | 03 Mar 2014 | 10,000 | 26,697 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Fokko Pentinga | Director, President and CEO | Sale of securities on an exchange or to another person at price $ 0.00 per share. | 03 Mar 2014 | 4,000 | 26,697 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Fokko Pentinga | Director, President and CEO | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 03 Mar 2014 | 11,250 | 37,947 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Fokko Pentinga | Director, President and CEO | Sale of securities on an exchange or to another person at price $ 0.00 per share. | 03 Mar 2014 | 11,250 | 26,697 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Fokko Pentinga | Director, President and CEO | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 03 Mar 2014 | 21,250 | 28,750 | - | - | Amtech Systems, Inc. Employee Stock Option | |
| Jong S. Whang | Director, Executive Chairman | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 28 Feb 2014 | 6,300 | 113,579 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Jong S. Whang | Director, Executive Chairman | Sale of securities on an exchange or to another person at price $ 0.00 per share. | 28 Feb 2014 | 24,950 | 107,279 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Jong S. Whang | Director, Executive Chairman | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 28 Feb 2014 | 24,950 | 132,229 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Jong S. Whang | Director, Executive Chairman | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 28 Feb 2014 | 6,300 | 43,700 | - | - | Amtech Systems, Inc. Employee Stock Option | |
| Jong S. Whang | Director, Executive Chairman | Sale of securities on an exchange or to another person at price $ 0.00 per share. | 28 Feb 2014 | 6,300 | 107,279 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Jong S. Whang | Director, Executive Chairman | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 28 Feb 2014 | 24,950 | 18,750 | - | - | Amtech Systems, Inc. Employee Stock Option | |
| Bradley C. Anderson | Chief Financial Officer | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 28 Feb 2014 | 7,500 | 0 | - | - | Amtech Systems, Inc. Employee Stock Option | |
| Bradley C. Anderson | Chief Financial Officer | Sale of securities on an exchange or to another person at price $ 0.00 per share. | 28 Feb 2014 | 15,000 | 45,766 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Bradley C. Anderson | Chief Financial Officer | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 28 Feb 2014 | 15,000 | 0 | - | - | Amtech Systems, Inc. Employee Stock Option | |
| Bradley C. Anderson | Chief Financial Officer | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 28 Feb 2014 | 7,500 | 53,266 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Bradley C. Anderson | Chief Financial Officer | Sale of securities on an exchange or to another person at price $ 0.00 per share. | 28 Feb 2014 | 7,500 | 45,766 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Bradley C. Anderson | Chief Financial Officer | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 28 Feb 2014 | 15,000 | 60,766 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Robert F. King | None | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 28 Feb 2014 | 5,000 | 0 | - | - | Amtech Systems, Inc. Non-Employee Director Stock Option | |
| Robert F. King | None | Sale of securities on an exchange or to another person at price $ 0.00 per share. | 28 Feb 2014 | 5,000 | 10,000 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Robert F. King | None | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 28 Feb 2014 | 5,000 | 15,000 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Jong S. Whang | Director, Executive Chairman | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 19 Feb 2014 | 24,914 | 132,193 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Jong S. Whang | Director, Executive Chairman | Sale of securities on an exchange or to another person at price $ 0.00 per share. | 19 Feb 2014 | 24,914 | 107,279 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Jong S. Whang | Director, Executive Chairman | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 19 Feb 2014 | 24,914 | 12,686 | - | - | Amtech Systems, Inc. Employee Stock Option | |
| Jong S. Whang | Director, Executive Chairman | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 19 Feb 2014 | 22,400 | 37,600 | - | - | Amtech Systems, Inc. Employee Stock Option | |
| Jong S. Whang | Director, Executive Chairman | Sale of securities on an exchange or to another person at price $ 0.00 per share. | 19 Feb 2014 | 22,400 | 107,279 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Jong S. Whang | Director, Executive Chairman | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 19 Feb 2014 | 22,400 | 129,679 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Jong S. Whang | Director, Executive Chairman | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 19 Feb 2014 | 12,686 | 0 | - | - | Amtech Systems, Inc. Employee Stock Option | |
| Jong S. Whang | Director, Executive Chairman | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 19 Feb 2014 | 12,686 | 119,965 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Jong S. Whang | Director, Executive Chairman | Sale of securities on an exchange or to another person at price $ 0.00 per share. | 19 Feb 2014 | 12,686 | 107,279 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Fokko Pentinga | Director, President and CEO | Sale of securities on an exchange or to another person at price $ 0.00 per share. | 18 Feb 2014 | 4,053 | 34,697 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Bradley C. Anderson | Chief Financial Officer | Sale of securities on an exchange or to another person at price $ 0.00 per share. | 11 Feb 2014 | 7,500 | 45,766 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Bradley C. Anderson | Chief Financial Officer | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 11 Feb 2014 | 15,637 | 24,363 | - | - | Amtech Systems, Inc. Employee Stock Option | |
| Bradley C. Anderson | Chief Financial Officer | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 11 Feb 2014 | 9,361 | 15,002 | - | - | Amtech Systems, Inc. Employee Stock Option | |
| Bradley C. Anderson | Chief Financial Officer | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 11 Feb 2014 | 9,361 | 15,002 | - | - | Amtech Systems, Inc. Employee Stock Option | |
| Bradley C. Anderson | Chief Financial Officer | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 11 Feb 2014 | 7,500 | 53,266 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Bradley C. Anderson | Chief Financial Officer | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 11 Feb 2014 | 15,637 | 24,363 | - | - | Amtech Systems, Inc. Employee Stock Option | |
| Bradley C. Anderson | Chief Financial Officer | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 11 Feb 2014 | 9,361 | 55,127 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Bradley C. Anderson | Chief Financial Officer | Sale of securities on an exchange or to another person at price $ 0.00 per share. | 11 Feb 2014 | 15,637 | 45,766 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Bradley C. Anderson | Chief Financial Officer | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 11 Feb 2014 | 7,500 | 7,500 | - | - | Amtech Systems, Inc. Employee Stock Option | |
| Bradley C. Anderson | Chief Financial Officer | Sale of securities on an exchange or to another person at price $ 0.00 per share. | 11 Feb 2014 | 9,361 | 45,766 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Bradley C. Anderson | Chief Financial Officer | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 11 Feb 2014 | 7,500 | 47,016 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Bradley C. Anderson | Chief Financial Officer | Sale of securities on an exchange or to another person at price $ 0.00 per share. | 11 Feb 2014 | 7,500 | 39,516 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Bradley C. Anderson | Chief Financial Officer | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 11 Feb 2014 | 9,361 | 48,877 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Bradley C. Anderson | Chief Financial Officer | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 11 Feb 2014 | 15,637 | 55,153 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Bradley C. Anderson | Chief Financial Officer | Sale of securities on an exchange or to another person at price $ 0.00 per share. | 11 Feb 2014 | 15,637 | 39,516 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Bradley C. Anderson | Chief Financial Officer | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 11 Feb 2014 | 15,637 | 61,403 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Bradley C. Anderson | Chief Financial Officer | Sale of securities on an exchange or to another person at price $ 0.00 per share. | 11 Feb 2014 | 9,361 | 39,516 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Bradley C. Anderson | Chief Financial Officer | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 11 Feb 2014 | 7,500 | 7,500 | - | - | Amtech Systems, Inc. Employee Stock Option | |
| Schreyer J Leslie | Ten Percent Owner | Purchase of securities on an exchange or from another person at price $ 0.00 per share. | 06 Jan 2014 | 13,600 | 791,750 | - | - | Common Stock | |
| Schreyer J Leslie | Ten Percent Owner | Purchase of securities on an exchange or from another person at price $ 0.00 per share. | 31 Dec 2013 | 17,400 | 778,150 | - | - | Common Stock | |
| Jong S. Whang | Director, Executive Chairman | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 12 Dec 2013 | 50,000 | 50,000 | - | - | Amtech Systems, Inc. Employee Stock Option | |
| Michael Garnreiter | None | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 12 Dec 2013 | 6,000 | 6,000 | - | - | Amtech Systems, Inc. Non-Employee Director Stock Option | |
| Bradley C. Anderson | Chief Financial Officer | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 12 Dec 2013 | 35,406 | 35,406 | - | - | Amtech Systems, Inc. Employee Stock Option | |
| Robert F. King | None | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 12 Dec 2013 | 6,000 | 6,000 | - | - | Amtech Systems, Inc. Non-Employee Director Stock Option | |
| Alfred W. Giese | None | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 12 Dec 2013 | 6,000 | 6,000 | - | - | Amtech Systems, Inc. Non-Employee Director Stock Option | |
| Goudena J. G. Egbert | None | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 12 Dec 2013 | 6,000 | 6,000 | - | - | Amtech Systems, Inc. Non-Employee Director Stock Option | |
| Fokko Pentinga | Director, President and CEO | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 12 Dec 2013 | 50,000 | 50,000 | - | - | Amtech Systems, Inc. Employee Stock Option | |
| Jong S. Whang | Director, Executive Chairman | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 11 Dec 2012 | 50,000 | 50,000 | - | - | Amtech Systems, Inc. Employee Stock Option | |
| Robert T. Hass | Chief Accounting Officer | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 11 Dec 2012 | 12,500 | 12,500 | - | - | Amtech Systems, Inc. Employee Stock Option | |
| Michael Garnreiter | None | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 11 Dec 2012 | 6,000 | 6,000 | - | - | Amtech Systems, Inc. Non-Employee Director Stock Option | |
| Bradley C. Anderson | Chief Financial Officer | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 11 Dec 2012 | 40,000 | 40,000 | - | - | Amtech Systems, Inc. Employee Stock Option | |
| Robert F. King | None | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 11 Dec 2012 | 6,000 | 6,000 | - | - | Amtech Systems, Inc. Non-Employee Director Stock Option | |
| Alfred W. Giese | None | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 11 Dec 2012 | 6,000 | 6,000 | - | - | Amtech Systems, Inc. Non-Employee Director Stock Option | |
| Jeong Mo Hwang | Chief Technology Officer | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 11 Dec 2012 | 15,000 | 15,000 | - | - | Amtech Systems, Inc. Employee Stock Option | |
| Goudena J. G. Egbert | None | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 11 Dec 2012 | 6,000 | 6,000 | - | - | Amtech Systems, Inc. Non-Employee Director Stock Option | |
| Fokko Pentinga | Director, President and CEO | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 11 Dec 2012 | 50,000 | 50,000 | - | - | Amtech Systems, Inc. Employee Stock Option | |
| Goudena J. G. Egbert | None | Purchase of securities on an exchange or from another person at price $ 0.00 per share. | 31 May 2012 | 4,000 | 7,000 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Jong S. Whang | Director, Chief Executive Officer | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 15 Dec 2011 | 18,333 | 107,279 | - | - | Restricted Stock | |
| Jong S. Whang | Director, Chief Executive Officer | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 15 Dec 2011 | 36,667 | 36,667 | - | - | Stock Options | |
| Robert T. Hass | Chief Accounting Officer | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 15 Dec 2011 | 5,000 | 5,000 | - | - | Stock Options | |
| Robert T. Hass | Chief Accounting Officer | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 15 Dec 2011 | 2,500 | 12,042 | - | - | Restricted Stock | |
| Michael Garnreiter | None | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 15 Dec 2011 | 6,000 | 6,000 | - | - | Common Stock | |
| Bradley C. Anderson | Chief Financial Officer | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 15 Dec 2011 | 16,667 | 16,667 | - | - | Stock Options | |
| Bradley C. Anderson | Chief Financial Officer | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 15 Dec 2011 | 8,333 | 45,766 | - | - | Restricted Stock | |
| Robert F. King | None | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 15 Dec 2011 | 6,000 | 6,000 | - | - | Common Stock | |
| Alfred W. Giese | None | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 15 Dec 2011 | 6,000 | 6,000 | - | - | Common Stock | |
| Jeong Mo Hwang | Chief Technology Officer | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 15 Dec 2011 | 2,500 | 2,500 | - | - | Restricted Stock | |
| Jeong Mo Hwang | Chief Technology Officer | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 15 Dec 2011 | 5,000 | 5,000 | - | - | Stock Options | |
| Goudena J. G. Egbert | None | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 15 Dec 2011 | 6,000 | 6,000 | - | - | Common Stock | |
| Fokko Pentinga | Director, President | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 15 Dec 2011 | 85,000 | 85,000 | - | - | Stock Options | |
| Fokko Pentinga | Director, President | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 15 Dec 2011 | 15,000 | 38,750 | - | - | Restricted Stock | |
| SooKap Hahn | None | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 15 Dec 2011 | 6,000 | 6,000 | - | - | Common Stock | |
| Goudena J. G. Egbert | None | Purchase of securities on an exchange or from another person at price $ 0.00 per share. | 15 Aug 2011 | 2,000 | 3,000 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Jong S. Whang | Chief Executive Officer | Purchase of securities on an exchange or from another person at price $ 0.00 per share. | 11 Aug 2011 | 8,913 | 88,946 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Bradley C. Anderson | Chief Financial Officer | Purchase of securities on an exchange or from another person at price $ 0.00 per share. | 11 Aug 2011 | 4,000 | 31,600 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| SooKap Hahn | None | Grant, award, or other acquisition of securities at price $ 0.00 per share. | 20 Apr 2011 | 6,000 | 6,000 | - | - | Amtech Systems, Inc. Non-Employee Director Stock Option | |
| Goudena J. G. Egbert | None | Purchase of securities on an exchange or from another person at price $ 0.00 per share. | 10 Mar 2011 | 1,000 | 1,000 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Alfred W. Giese | None | Purchase of securities on an exchange or from another person at price $ 0.00 per share. | 02 Mar 2011 | 520 | 1,520 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Jong S. Whang | Director, Chief Executive Officer | Purchase of securities on an exchange or from another person at price $ 0.00 per share. | 28 Feb 2011 | 2,100 | 77,933 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Jong S. Whang | Director, Chief Executive Officer | Purchase of securities on an exchange or from another person at price $ 0.00 per share. | 28 Feb 2011 | 100 | 78,033 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Jong S. Whang | Director, Chief Executive Officer | Purchase of securities on an exchange or from another person at price $ 0.00 per share. | 28 Feb 2011 | 1,700 | 79,733 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Jong S. Whang | Director, Chief Executive Officer | Purchase of securities on an exchange or from another person at price $ 0.00 per share. | 28 Feb 2011 | 100 | 79,833 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Jong S. Whang | Director, Chief Executive Officer | Purchase of securities on an exchange or from another person at price $ 0.00 per share. | 28 Feb 2011 | 200 | 80,033 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Bradley C. Anderson | Chief Financial Officer | Purchase of securities on an exchange or from another person at price $ 0.00 per share. | 28 Feb 2011 | 2,100 | 27,600 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Michael Garnreiter | None | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 16 Feb 2011 | 1,148 | 1,148 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Michael Garnreiter | None | Sale of securities on an exchange or to another person at price $ 0.00 per share. | 16 Feb 2011 | 1,148 | 0 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Michael Garnreiter | None | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 16 Feb 2011 | 852 | 852 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Michael Garnreiter | None | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 16 Feb 2011 | 2,000 | 2,852 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Michael Garnreiter | None | Sale of securities on an exchange or to another person at price $ 0.00 per share. | 16 Feb 2011 | 852 | 2,000 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Michael Garnreiter | None | Sale of securities on an exchange or to another person at price $ 0.00 per share. | 16 Feb 2011 | 2,000 | 0 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Michael Garnreiter | None | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 16 Feb 2011 | 1,148 | 3,852 | - | - | Amtech Systems, Inc. Non-Employee Director Stock Option | |
| Michael Garnreiter | None | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 16 Feb 2011 | 852 | 3,000 | - | - | Amtech Systems, Inc. Non-Employee Director Stock Option | |
| Michael Garnreiter | None | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 16 Feb 2011 | 2,000 | 1,000 | - | - | Amtech Systems, Inc. Non-Employee Director Stock Option | |
| Michael Garnreiter | None | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 14 Feb 2011 | 1,000 | 5,000 | - | - | Amtech Systems, Inc. Non-Employee Director Stock Option | |
| Michael Garnreiter | None | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 14 Feb 2011 | 1,000 | 1,000 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Michael Garnreiter | None | Sale of securities on an exchange or to another person at price $ 0.00 per share. | 14 Feb 2011 | 1,000 | 0 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Jong S. Whang | Director, Chief Executive Officer | Sale of securities on an exchange or to another person at price $ 0.00 per share. | 10 Dec 2010 | 12,500 | 75,833 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Fokko Pentinga | President | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 10 Dec 2010 | 1,875 | 0 | - | - | Amtech Systems, Inc. Employee Stock Option | |
| Fokko Pentinga | President | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 10 Dec 2010 | 250 | 0 | - | - | Amtech Systems, Inc. Employee Stock Option | |
| Fokko Pentinga | President | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 10 Dec 2010 | 9,375 | 3,125 | - | - | Amtech Systems, Inc. Employee Stock Option | |
| Fokko Pentinga | President | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 10 Dec 2010 | 1,875 | 27,500 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Fokko Pentinga | President | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 10 Dec 2010 | 250 | 27,750 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Fokko Pentinga | President | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 10 Dec 2010 | 9,375 | 37,125 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Fokko Pentinga | President | Sale of securities on an exchange or to another person at price $ 0.00 per share. | 10 Dec 2010 | 11,500 | 25,625 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Fokko Pentinga | President | Sale of securities on an exchange or to another person at price $ 0.00 per share. | 10 Dec 2010 | 1,875 | 23,750 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Bradley C. Anderson | Chief Financial Officer | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 09 Dec 2010 | 5,000 | 17,500 | - | - | Amtech Systems, Inc. Employee Stock Option | |
| Bradley C. Anderson | Chief Financial Officer | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 09 Dec 2010 | 2,500 | 15,000 | - | - | Amtech Systems, Inc. Employee Stock Option | |
| Bradley C. Anderson | Chief Financial Officer | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 09 Dec 2010 | 2,500 | 7,500 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Bradley C. Anderson | Chief Financial Officer | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 09 Dec 2010 | 5,000 | 30,500 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Bradley C. Anderson | Chief Financial Officer | Sale of securities on an exchange or to another person at price $ 0.00 per share. | 09 Dec 2010 | 5,000 | 25,500 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Bradley C. Anderson | Chief Financial Officer | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 09 Dec 2010 | 2,500 | 28,000 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Bradley C. Anderson | Chief Financial Officer | Sale of securities on an exchange or to another person at price $ 0.00 per share. | 09 Dec 2010 | 2,500 | 25,500 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Bradley C. Anderson | Chief Financial Officer | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 09 Dec 2010 | 2,500 | 28,000 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Bradley C. Anderson | Chief Financial Officer | Sale of securities on an exchange or to another person at price $ 0.00 per share. | 09 Dec 2010 | 2,500 | 25,500 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Robert F. King | None | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 09 Dec 2010 | 5,000 | 15,000 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Robert F. King | None | Sale of securities on an exchange or to another person at price $ 0.00 per share. | 09 Dec 2010 | 5,000 | 10,000 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Robert F. King | None | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 09 Dec 2010 | 5,000 | 0 | - | - | Amtech Systems, Inc. Non-Employee Director Stock Option | |
| Fokko Pentinga | President | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 03 Dec 2010 | 5,625 | 33,125 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Fokko Pentinga | President | Sale of securities on an exchange or to another person at price $ 0.00 per share. | 03 Dec 2010 | 5,625 | 27,500 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Fokko Pentinga | President | Sale of securities on an exchange or to another person at price $ 0.00 per share. | 03 Dec 2010 | 1,875 | 25,625 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Fokko Pentinga | President | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 03 Dec 2010 | 5,625 | 1,875 | - | - | Amtech Systems, Inc. Employee Stock Option | |
| Robert T. Hass | Chief Accounting Officer | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 01 Dec 2010 | 9,611 | 0 | - | - | Amtech Systems, Inc. Employee Stock Option | |
| Robert T. Hass | Chief Accounting Officer | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 01 Dec 2010 | 9,611 | 19,183 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Robert T. Hass | Chief Accounting Officer | Sale of securities on an exchange or to another person at price $ 0.00 per share. | 01 Dec 2010 | 9,611 | 9,542 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Robert F. King | None | Sale of securities on an exchange or to another person at price $ 0.00 per share. | 01 Dec 2010 | 1,000 | 10,000 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Alfred W. Giese | None | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 01 Dec 2010 | 2,500 | 2,500 | - | - | Amtech Systems, Inc. Non-Employee Director Stock Option | |
| Alfred W. Giese | None | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 01 Dec 2010 | 2,500 | 3,500 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Alfred W. Giese | None | Sale of securities on an exchange or to another person at price $ 0.00 per share. | 01 Dec 2010 | 2,500 | 1,000 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Fokko Pentinga | President | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 01 Dec 2010 | 15,000 | 0 | - | - | Amtech Systems, Inc. Employee Stock Option | |
| Fokko Pentinga | President | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 01 Dec 2010 | 15,000 | 43,750 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Fokko Pentinga | President | Sale of securities on an exchange or to another person at price $ 0.00 per share. | 01 Dec 2010 | 16,250 | 27,500 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Jong S. Whang | Director, Chief Executive Officer | Exercise or conversion of derivative security received from the company (such as an option) at price $ 0.00 per share. | 30 Nov 2010 | 9,042 | 112,375 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Jong S. Whang | Director, Chief Executive Officer | Sale of securities on an exchange or to another person at price $ 0.00 per share. | 30 Nov 2010 | 500 | 111,875 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Jong S. Whang | Director, Chief Executive Officer | Sale of securities on an exchange or to another person at price $ 0.00 per share. | 30 Nov 2010 | 13 | 111,862 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Jong S. Whang | Director, Chief Executive Officer | Sale of securities on an exchange or to another person at price $ 0.00 per share. | 30 Nov 2010 | 187 | 111,675 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Jong S. Whang | Director, Chief Executive Officer | Sale of securities on an exchange or to another person at price $ 0.00 per share. | 30 Nov 2010 | 5 | 111,670 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Jong S. Whang | Director, Chief Executive Officer | Sale of securities on an exchange or to another person at price $ 0.00 per share. | 30 Nov 2010 | 100 | 111,570 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Jong S. Whang | Director, Chief Executive Officer | Sale of securities on an exchange or to another person at price $ 0.00 per share. | 30 Nov 2010 | 20 | 111,550 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Jong S. Whang | Director, Chief Executive Officer | Sale of securities on an exchange or to another person at price $ 0.00 per share. | 30 Nov 2010 | 310 | 111,240 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Jong S. Whang | Director, Chief Executive Officer | Sale of securities on an exchange or to another person at price $ 0.00 per share. | 30 Nov 2010 | 700 | 110,540 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Jong S. Whang | Director, Chief Executive Officer | Sale of securities on an exchange or to another person at price $ 0.00 per share. | 30 Nov 2010 | 300 | 110,240 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Jong S. Whang | Director, Chief Executive Officer | Sale of securities on an exchange or to another person at price $ 0.00 per share. | 30 Nov 2010 | 312 | 109,928 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Jong S. Whang | Director, Chief Executive Officer | Sale of securities on an exchange or to another person at price $ 0.00 per share. | 30 Nov 2010 | 1,120 | 108,808 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Jong S. Whang | Director, Chief Executive Officer | Sale of securities on an exchange or to another person at price $ 0.00 per share. | 30 Nov 2010 | 680 | 108,128 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Jong S. Whang | Director, Chief Executive Officer | Sale of securities on an exchange or to another person at price $ 0.00 per share. | 30 Nov 2010 | 500 | 107,628 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Jong S. Whang | Director, Chief Executive Officer | Sale of securities on an exchange or to another person at price $ 0.00 per share. | 30 Nov 2010 | 600 | 107,028 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Jong S. Whang | Director, Chief Executive Officer | Sale of securities on an exchange or to another person at price $ 0.00 per share. | 30 Nov 2010 | 200 | 106,828 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Jong S. Whang | Director, Chief Executive Officer | Sale of securities on an exchange or to another person at price $ 0.00 per share. | 30 Nov 2010 | 300 | 106,528 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Jong S. Whang | Director, Chief Executive Officer | Sale of securities on an exchange or to another person at price $ 0.00 per share. | 30 Nov 2010 | 500 | 106,028 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Jong S. Whang | Director, Chief Executive Officer | Sale of securities on an exchange or to another person at price $ 0.00 per share. | 30 Nov 2010 | 280 | 105,748 | - | - | Amtech Systems, Inc. $.01 par value common stock | |
| Jong S. Whang | Director, Chief Executive Officer | Sale of securities on an exchange or to another person at price $ 0.00 per share. | 30 Nov 2010 | 100 | 105,648 | - | - | Amtech Systems, Inc. $.01 par value common stock |